EUV lithography scanner

Huawei files patent for EUV scanner rumored to be used for sub-7nm process development

According to UDN, Huawei has filed a patent application for an extreme ultraviolet (EUV) lithography scanner. If the company can create such a scanner...
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Nivedita Bangari

Huawei files patent for EUV scanner rumored to be used for...

According to UDN, Huawei has filed a patent application for an extreme ultraviolet (EUV) lithography scanner. If the company can create such a scanner...